Equipment

1) Manufacturing Facilities

• Laser marking machine (60W laser)

• Polymer/Metal 3D Printers at Shared Facilities

• High current power supply (15V/50A), (48V/13A) &(30V/10A)

• Air/Ball bearing spindles (Dover Instruments, Guzik)

• Precision linear stages (10nm resolution, Parker Inc.)

• Air bearing linear slides (300 mm stroke, Aerotech)

• Precision XY nanopositioners (Lab-built)

• Precision XY, XYZ CNC routers

• XYZ routers, Hot-stamping machine, Vacuum chamber

• Laser marking machine (50W)

2) Metrology Facilities

• Wafer inspection stage (lab-built)

• White light interferometry (Zygo Gauge, 3D microscope) at Shared Facilities

• High-speed cameras

• Infrared microscope

• Electrochemical impedance spectroscopy (4192a)

• Lock-in amplifiers (SRS 830/845)

• Laser interferometer set (Agilent)

• IR Spectrometer (1000-2500nm)

• VIR Spectrometers (200-1200nm)

• SEM at Shared Facilities

• Surface profiler (KLA-Tencor) at Shared Facilities

• Optical microscopes

• Dynamic signal analyzer (DSA, 4 Channel Agilent 35670a) 

• XY flexure mechanisms (PZT actuators, cap probes, strain-gauge sensors)

3) Lasers

• Stabilized fiber laser (1550nm, Thorlabs)

• Fiber laser (540nm, 635nm, 650nm, Thorlabs)

• Stabilized He-Ne laser (623.8nm): Coherent Inc, Thorlabs Inc.

• Stabilized He-Ne lasers (632.8nm): REO

• Laser diodes (407nm, 520nm, 650nm)

4) Sensors

• Laser displacement sensors (Keyence, LK-G30) 

• Capacitive type sensors (Lion Precision, Capacitec, ADE Technologies)

• Force sensors (Kistler 9201 + 1-axis charge amplifier, load cells)

• Optical pyrometers (350C, 1600C) 

• Light power meter (Newport Inc)

• Digital dial gauges (1um resolution)

• Accelerometers (PCB Electronics Inc., Kistler)

• Photodetectors (Newport Inc, Measurement Specialist Inc. Hamamatsu Corp.)

• Ferromaster (magnetic permeability tester)

5) Actuators

• PZT actuators with driver (0.3nm resolution, PI Inc.)

• Voice coil motors (Moticont)

• BLDC motor drivers 750/600W/1kW/2kW

• XY Galvanometer (closed controlled)

6) Data Acquisition/Control Units

• UMAC (Detal Tau Inc., ADC, 4ch Interpolator)

• LabView Daq (USB6343, 4 units)

• NI cRio ( 8 channels)

• Oscilloscopes (Tektronix, BK Precision)

• Function generators (BK Precision, Keysight, NF Waveform)

7) Software

• Ansys, Abacus

• Autodesk, Solidworks, PCT

• Matlab, MathCad, Mathematica

• NI LabView

If you have any assistance, please contact me (MEOB 320) or visit JCAIN 313/441.